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Effect of thermal annealing on the optical and structural properties of silicon implanted with a high hydrogen fluence

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Abstract

Effect of thermal annealing on the optical and structural properties of silicon implanted with a high hydrogen fluence

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Tags: Ion implantation; Elastic recoil detection; Cathodoluminescence; UV/VIS reflection
Size: 1.02MB
Uploaded by Samson Gajere
Uploaded on 23/07/2021
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